진공 PUMP

   유확산 PUMP

       <SPECIFICATION>

MODEL	PUMPING SPEED(L/min)	OIL FILLING	ULTIMATI PRESSURE
SD - 4C	600	180cc	10-7 torr
SD - 6C	1000	300
SD - 8C	2000	600
SD - 10C	3500	1000	10-6 torr
SD - 15C	5500	1600

   진공 GAGE

        <SPECIFICATION>

MODEL	TYPE	RANGE(torr)	DISPLAY
SPG - 1S	PIRANI	10 ~ 10-3	DIGITAL
SPE - 1S	PENNING	10-3 ~ 10-6	ANALOG
SCG -1S	CONVECTRON	1000 ~ 10-3	DIGITAL
SIG - 1S	IONIZATION	10-3 ~ 10-9	DIGITAL
SCIG - 1C	CONVECTRON IONIZATION	1000 ~ 10-9	DIGITAL

        기타진공부품

<진 공 CHAMBER>

< 진 공 VALVE>

<진공 OIL & GREASE>